发明名称 Method for making thin film transistor
摘要 A method for making a thin film transistor, the method comprising the steps of: (a) providing a carbon nanotube array and an insulating substrate; (b) pulling out a carbon nanotube film from the carbon nanotube array by using a tool; (c) placing at least one carbon nanotube film on a surface of the insulating substrate, to form a carbon nanotube layer thereon; (d) forming a source electrode and a drain electrode; wherein the source electrode and the drain electrode being spaced therebetween, and electrically connected to the carbon nanotube layer; and (e) covering the carbon nanotube layer with an insulating layer, and a gate electrode being located on the insulating layer.
申请公布号 US7947542(B2) 申请公布日期 2011.05.24
申请号 US20090384331 申请日期 2009.04.02
申请人 TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. 发明人 LIU KAI;JIANG KAI-LI;FAN SHOU-SHAN
分类号 H01L21/00 主分类号 H01L21/00
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