发明名称 Embedded bit line structure, field effect transistor structure with the same and method of fabricating the same
摘要 An embedded bit line structure, in which, a substrate includes an insulator layer having an original top surface and a semiconductor layer on the original top surface of the insulator layer, and a bit line is disposed within the lower portion of the trench along one side of an active area. The bit line includes a first portion and a second portion. The first portion is located within the insulator layer and below the original top surface of the insulator layer. The second portion is disposed on the first portion to electrically connect the semiconductor layer of the active area. An insulator liner is disposed on the first portion of the bit line and between the second portion of the bit line and the semiconductor layer of the substrate opposite the active area for isolation. An STI is disposed within the trench to surround the active area for isolation.
申请公布号 US7948027(B1) 申请公布日期 2011.05.24
申请号 US20090635662 申请日期 2009.12.10
申请人 NANYA TECHNOLOGY CORP. 发明人 RENN SHING-HWA;HUANG CHENG-CHIH;HUANG YUNG-MENG
分类号 H01L29/76 主分类号 H01L29/76
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