发明名称 MOS device with varying trench depth
摘要 A semiconductor device includes a drain, an epitaxial layer overlaying the drain, a body disposed in the epitaxial layer, a source embedded in the body, a gate trench extending into the epitaxial layer, a gate disposed in the gate trench, an active region contact trench extending through the source, the active region contact trench having a varying contact trench depth, and an active region contact electrode disposed within the active region contact trench.
申请公布号 US7948029(B2) 申请公布日期 2011.05.24
申请号 US20080228142 申请日期 2008.08.07
申请人 ALPHA AND OMEGA SEMICONDUCTOR INCORPORATED 发明人 BHALLA ANUP;WANG XIAOBIN
分类号 H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
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