发明名称 Method of manufacturing a piezoelectric vibrator
摘要 A method of manufacturing a piezoelectric vibrator comprises forming a gettering metal film on a surface of a piezoelectric vibrator piece and forming a frequency-adjusting weight, separate from the gettering metal film, on the piezoelectric vibrator piece. The piezoelectric vibrator piece is then placed in a hermetic container after which the hermetic container is hermetically sealed. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the frequency-adjusting weight to adjust the frequency of vibration of the piezoelectric vibrator piece.
申请公布号 US7946008(B2) 申请公布日期 2011.05.24
申请号 US20070796443 申请日期 2007.04.27
申请人 SEIKO INSTRUMENTS INC. 发明人 SHIMIZU SATOSHI;MATSUYAMA MASARU
分类号 H01L41/053;H03H9/10;H02N2/04;H03H3/02;H03H3/04 主分类号 H01L41/053
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