SUBSTRATES COATING UNIT, SUBSTRATES TREATING APPARATUS HAVING THE SAME AND METHOD OF TREATING SUBSTRATES USING THE SAME,申请号KR20080119386-传众专利搜索

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发明名称	SUBSTRATES COATING UNIT, SUBSTRATES TREATING APPARATUS HAVING THE SAME AND METHOD OF TREATING SUBSTRATES USING THE SAME
摘要
申请公布号	KR101036606(B1)	申请公布日期	2011.05.24
申请号	KR20080119386	申请日期	2008.11.28
申请人		发明人
分类号	H01L21/027;H01L21/08	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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