发明名称 Photosensitive compound and photoresist composition including the same
摘要 A photosensitive compound whose size is smaller than conventional polymer for photoresist, and which has well-defined (uniform) structure, and a photoresist composition including the same are disclosed. The photosensitive compound represented by the following formula 1. Also, the photoresist composition comprises 1 to 85 wt % (weight %) of the photosensitive compound; 0.05 to 15 weight parts of a photo-acid generator with respect to 100 weight parts of the photosensitive compound; and 200 to 5000 weight parts of an organic solvent. In the formula 1, x is 1, 2, 3, 4 or 5, y is 2, 3, 4, 5 or 6, and R and R′are independently a chain type or a ring type of aliphatic or aromatic hydrocarbon group of 1 to 30 carbon atoms.
申请公布号 US7947423(B2) 申请公布日期 2011.05.24
申请号 US20080208586 申请日期 2008.09.11
申请人 DONGJIN SEMICHEM CO., LTD. 发明人 LEE JAE-WOO;YOO MIN-JA;LEE JUN-GYEONG;LIM YOUNG-BAE;KIM JAE-HYUN
分类号 G03F7/039;C07C43/205;G03F7/20;G03F7/30;G03F7/38 主分类号 G03F7/039
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