发明名称 Method and apparatus for automatically detecting and correcting misalignment of a semiconductor chip
摘要 One embodiment of the present invention provides a system that automatically detects and corrects a misalignment of a semiconductor chip. During operation, the system uses a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip. Next, the system uses an actuation mechanism integrated with the chip to automatically correct the misalignment, thereby improving performance and reliability of the chip.
申请公布号 US7949436(B2) 申请公布日期 2011.05.24
申请号 US20060437456 申请日期 2006.05.19
申请人 ORACLE AMERICA, INC. 发明人 DROST ROBERT J.;HO RONALD;DOUGLAS DAVID C.
分类号 G05D1/02 主分类号 G05D1/02
代理机构 代理人
主权项
地址