| 摘要 |
PURPOSE: A device for deposing a thin film is provided to prevent substrates from sagging and reduce construction costs of a production line by maximizing common use of overlapped equipment. CONSTITUTION: A device for deposing a thin film comprises a chamber, first and second substrate holders, a deposition source, and a fixing unit. A reaction space is formed in a chamber. The first and second substrate holders support a substrate vertically to the surface. The deposition source supplies deposition material on the first substrate holder and the second substrate holder. The fixing unit positions the first substrate holder and the second substrate holder inside the chamber for a fixed time when a substrate is accepted into the first and second substrate holders. The fixing unit comprises a fixing unit and a lifting unit.
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