Capacitive micro-transducer for ultrasonic instrumentation system, has intermediate crown made of first material and surrounded by peripheral crown in second material, where first material is rigid than that of second and third materials

摘要

The micro-transducer has a vibrating membrane made of silicon substrate and provided with a cavity (24) and a central part (22) surrounded by an intermediate crown (23), where the intermediate crown is made of a first material. The central part is made of a second material. The intermediate crown is surrounded by a peripheral crown (21) in a third material, where the first material is rigid than that of the second and the third materials. An internal periphery of the peripheral crown extends above the cavity. The second and third materials are silicon nitrides. The first material is polymer. An independent claim is a method for manufacturing a capacitive micro-transducer.