LAMINATING APPARATUS HAVING MICA HEATER

摘要

PURPOSE: A laminating device including a mica heater is provided to prevent dust at a vacuum atmosphere by including a coating layer which surrounds mica. CONSTITUTION: Mica(110) generates heat. A coating layer(120) coats the mica. A lower panel is arranged on the lower side of a heater. A heater panel is arranged on the upper side of the heater. The heater is directly attached to the lower panel or heater panel by including a planar shape.