REDUCTION OF ETCH-RATE DRIFT IN HDP PROCESSES,申请号KR20080088145-传众专利搜索

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发明名称	REDUCTION OF ETCH-RATE DRIFT IN HDP PROCESSES
摘要
申请公布号	KR101035775(B1)	申请公布日期	2011.05.20
申请号	KR20080088145	申请日期	2008.09.08
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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