| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas discharge device which enables attainment of thinning. SOLUTION: The gas discharge device includes a duct 92 having an opening part 921, a lid part 93 covering the opening part 921, a wall part forming member 95 which is constituted to be extensible and contractible in the shape of an arc by that U-shaped members 96 are combined in a nested shape and rotated around a rotating shaft member 954, while the lid part 93 is connected to the inside or outside U-shaped member 96, and a driving mechanism 94 which makes the rotating shaft member 954 rotate. The wall part forming member 95 is stored inside the duct 92 when it is in a contracted state, while it forms a lateral wall part 952 on the side edge side of the lid part 93 and forms a front wall part on the front edge side of the lid part 93 in an extended state. The U-shaped members 96 have engagement portions 964 and 965 which make the U-shaped members 96 engage with the adjacent ones when the wall part forming member 95 is in the extended state, and the U-shaped members 96 are raised sequentially from the inside or outside U-shaped member 96 connected to the lid part 93 by that the engagement portions 964 and 965 engage with each other while the wall part forming member 95 is made to change from the contracted state to the extended. COPYRIGHT: (C)2011,JPO&INPIT |
