| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of teaching a handler and a handler, which are capable of accurately acquiring the height of a grip member that comes into contact with the upper surface of a semiconductor chip with a simple structure even if the back pressure of gas jetting from the grip member when the grip member is brought close to the upper surface of the semiconductor chip does not rise up to predetermined pressure. SOLUTION: When a suction pad is moved down toward an IC chip disposed in a testing socket, the suction pad is moved down while jetting the gas from a tip thereof. Then the flow rate of the gas jetting from the tip of the suction pad is detected by a flow sensor, and the lowering position of the suction pad when the flow rate detected by the flow sensor decreases to a predetermined value is registered, in a storage, as the height at which the suction pad comes into contact with the upper surface of the IC chip. COPYRIGHT: (C)2011,JPO&INPIT |
