SILVER ALLOY TARGET FOR FORMING REFLECTING ELECTRODE FILM OF ORGANIC EL ELEMENT, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a silver alloy target for forming a reflecting electrode film of an organic EL element capable of restraining a splash even though large power is supplied to the target in response to enlargement of the target. SOLUTION: In the silver alloy target including Indium of 0.1-1.5 mass% and having component composition made from Ag as a balance and unavoidable impurity, an average particle diameter of crystal particles of the silver alloy is 150-400 μm, variations of particle diameters of the crystal particles are 20% or below of the average particle diameter. The silver alloy target is used for forming the reflecting electrode film of the organic EL element. COPYRIGHT: (C)2011,JPO&INPIT