| 摘要 |
PROBLEM TO BE SOLVED: To allow a mask which is once used to be re-used in a film forming process without cleaning the mask, in a method for manufacturing a film-formed product with an aluminum film formed on a surface of a lead frame by using the mask having an aperture. SOLUTION: A mask 100 is formed of the same material as aluminum which is a film forming material. After forming an aluminum film 40 by the thermal spraying, the mask 100 with thermal-sprayed aluminum 40a deposited on its upper surface and a side surface of an aperture 101 is detached from a lead frame 10, and pressed together with the thermal-sprayed aluminum 40a. Thus, the mask is formed in such a shape to be re-used in the film forming process of the aluminum film 40. COPYRIGHT: (C)2011,JPO&INPIT
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