发明名称 IMAGING OPTICAL SYSTEM
摘要 An imaging optical system includes a plurality of mirrors configured to image an object field in an object plane of the imaging optical system into an image field in an image plane of the imaging optical system. An illumination system includes such an imaging optical system. The transmission losses of the illumination system are relatively low.
申请公布号 KR20110053273(A) 申请公布日期 2011.05.19
申请号 KR20117008141 申请日期 2009.08.26
申请人 CARL ZEISS SMT GMBH 发明人 MANN HANS JURGEN;SCHOPPACH ARMIN;ZELLNER JOHANNES
分类号 G02B17/06;G02B7/00;G03F7/20 主分类号 G02B17/06
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