发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for detecting a failure in a path between a data input/output pad and a test pad and a failure in a circuit in the middle of the path. SOLUTION: A micro-bump pad (a first pad 21) for data input/output is arranged in a connection path between the test pad (second pad 22) used for testing a semiconductor device and an internal circuit 23. Consequently, it is possible to detect a connection failure and a circuit failure of all the paths to the internal circuit 23 when executing a test using the second pad 22. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011100898(A) 申请公布日期 2011.05.19
申请号 JP20090255325 申请日期 2009.11.06
申请人 SONY CORP 发明人 KURODA MASAMITSU
分类号 H01L21/66;G01R31/28;H01L21/822;H01L27/04 主分类号 H01L21/66
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