| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liner removing method which minimizes damage to a bulk packed material in a groove while substantially removing an excessive part of a conformal liner formed in the groove. <P>SOLUTION: The liner removing method includes the steps of: forming a groove in a substrate; stacking a conformal liner in the groove; packing the groove with the bulk packed material; and selectively removing an excessive part of the conformal liner by alternately forming a protective layer on the exposed surface of the bulk packed material and etching the conformal liner. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
