摘要 |
PROBLEM TO BE SOLVED: To repair a defect of an organic EL element without destroying a foreign matter mixed in an organic layer and giving damages to other functional layer. SOLUTION: This is a manufacturing method of an organic EL display which has a substrate with a built-in TFT and a plurality of organic EL elements arranged in matrix shape on the substrate, and the organic EL element includes a first electrode arranged on the substrate, an organic layer arranged on the first electrode, and a second electrode arranged on the organic layer. The manufacturing method comprises a process to prepare the substrate in which the TFT is built, a process to form on the substrate the first electrode that is connected to the TFT, a process to form the organic layer on the first electrode, a process to detect the foreign matter mixed in the organic layer after formation of the organic layer, a process to form a groove to surround the foreign matter on the organic layer, and a process to form on the organic layer the second electrode which is separated from a region surrounded by the groove. COPYRIGHT: (C)2011,JPO&INPIT
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