| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator obtaining stable drop ejection characteristics by eliminating an operation failure caused by the breakage of a vibrating plate including a thin film piezoelectric element and the exfoliation of a joint surface in a heating process in a manufacturing process and during the use of a product. SOLUTION: A piezoelectric layer 22 laminated on recessed groove parts 19a formed in a second insulating layer 19 is formed with stepped parts 22a stepped down with a level difference deeper than the layer thickness d1 of the piezoelectric layer 22 in a flow direction A so as to be divided in stages. In the piezoelectric layer 22 divided in stages, flexural force in the flow direction A is thereby dispersed in comparison with a piezoelectric layer 22 not divided in stages, and the amount of flexure is comparatively small to suppress the exfoliation, crack initiation, breakage, etc. of the laminated vibrating plate 20 including the piezoelectric layer 22. COPYRIGHT: (C)2011,JPO&INPIT
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