LAYERED SINTERED MICROFLUIDIC DEVICES WITH CONTROLLED COMPRESSION DURING SINTERING AND ASSOCIATED METHODS

摘要

Embodiments are directed a method for reducing and/or controlling compression of stacked layers in a micro fluidic device, wherein the method comprises stacking at least two layers wherein at least one of the stacked layers comprises a microstructure. The microstructure comprises a fluid passage, a plurality of walls configured to define a spacing A1 between layers and a plurality of uniformly spaced pneumatic struts wherein the pneumatic struts define sealed containers comprising entrapped gas. The method further comprises the step of sintering the stacked layers wherein the sintering pressurizes the entrapped gas inside the pneumatic struts to oppose compression of the walls and compression of the spacing A1 between stacked layers.