发明名称 |
METHOD AND DEVICE FOR GENERATING PLASMA THROUGH ELECTRIC DISCHARGE IN DISCHARGE SPACE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for generating a plasma through electric discharge which result in a substantially longer operational life or to a higher average loading capacity of two electrodes with the use of technically simple means. <P>SOLUTION: In the method and the device for generating the plasma through electric discharge in a discharge space including at least two electrodes, at least one of the electrodes is formed from a matrix material or a carrier material so as to make an erosion-susceptible range with an evaporation spot formed by at least current flow. In the method and the device, a sacrifice material 38 wherein a boiling point of the sacrifice material 38 during a discharge operation is lower than a melting point of the carrier material 30 is arranged on at least the evaporation spot so as to mainly create a charge carrier generated in the current flow from the sacrifice material 38. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011100741(A) |
申请公布日期 |
2011.05.19 |
申请号 |
JP20100289649 |
申请日期 |
2010.12.27 |
申请人 |
KONINKL PHILIPS ELECTRONICS NV |
发明人 |
BOSCH ERIC GERARDUS THEODOOR;JONKERS JEROEN;NEFF WILLI;DERRA GUENTHER HANS |
分类号 |
H05H1/24;G21K5/02;H01L21/027;H05G2/00 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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