发明名称 OPTICAL ARTICLE, METHOD FOR MANUFACTURING THE OPTICAL ARTICLE, AND ELECTRONIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical article having high dust-proof performance. <P>SOLUTION: Dust-proof glass 10 has a multilayer inorganic thin film 2 on a substrate 1. The inorganic thin film 2 is formed by laminating a plurality of layers made of silicon oxide 2A and a plurality of layers made of metal oxide 2B, the metal oxide is metal oxide containing any one of zirconium, tantalum and titanium, the layers made of silicon oxide 2A include a low-density silicon oxide layer and a high-density silicon oxide layer having a density higher than that of the low-density silicon oxide layer, an outermost layer 2S of the inorganic thin film 2 is the low-density silicon oxide layer and surface roughness of the outermost layer 2S of the inorganic thin film 2 is equal to or greater than 0.55 nm and equal to or smaller than 0.70 nm. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011100111(A) 申请公布日期 2011.05.19
申请号 JP20100211690 申请日期 2010.09.22
申请人 SEIKO EPSON CORP 发明人 FURUSATO HIROYOSHI
分类号 G02B5/28;B32B9/00;C23C14/06;C23C14/08;G02B1/10;G02B1/11;G02B5/26 主分类号 G02B5/28
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