| 摘要 |
An all-differential resonant nanosensor apparatus for detecting multiple gasses and method of fabricating the same. The nanosensor apparatus generally includes a sensing loop, a reference loop, and a mixer. A sensing self assembled monolayer (SAM) or an ultrathin solid monolayer may be deposited on a sensing resonant beam associated with the sensing loop to detect the presence of the gas. A reference self assembled monolayer or an ultrathin solid film may be deposited on a reference resonant beam that possess similar visco-elastic properties (e.g., temperature, humidity and aging) as the sensing monolayer with no sensing properties. A differential reading electronic circuit may be interconnected with each resonant beam pair for signal processing. A drift-free frequency signal per each gas may be obtained by subtracting the frequency response from the sensing loop and the reference loop.
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