| 摘要 |
<P>PROBLEM TO BE SOLVED: To place a substrate on a substrate tray which is used to transfer the substrate, with good flatness. <P>SOLUTION: The substrate P placed on a plurality of first support pins 62 has its under surface pressed by a plurality of second support pins 63, so that deformation thereof is suppressed. The substrate P whose deformation is suppressed is placed on the substrate tray 90, so the substrate can be placed on the substrate tray 90 with good flatness. Since the substrate P is placed on the plurality of first support pins 62 by a substrate transfer robot supporting an end of the substrate P from below, the plurality of first support pins 62 cannot support the end of the substrate P, whose end droops by gravitation in a state where the substrate is placed on the plurality of first support pins 62, but the plurality of second support pins 63 suppress the drooping thereof. <P>COPYRIGHT: (C)2011,JPO&INPIT |
