METHOD FOR CLEANING CONVEYING ARM, METHOD FOR CLEANING SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for controlling a substrate treatment apparatus which removes contamination stuck to carrying arms. SOLUTION: The method for cleaning carrying arms each having an electrostatic chuck for performing the carrying of a substrate includes a voltage applying step of applying voltage with a polarity same as the polarity of the load of foreign matters charged to each electrode of each electrostatic chuck in a state where the substrate is not mounted on the carrying arm in the case that charged foreign matters are stuck to the carrying arm, wherein the foreign matters stuck to each carrying arm are removed. COPYRIGHT: (C)2011,JPO&INPIT