| 摘要 |
PROBLEM TO BE SOLVED: To increase detection accuracy of an inspection object even while ensuring detection of the inspection object without being affected by an outlier at all. SOLUTION: A pre-processing means obtains a virtual line 101 using an edge point Pe by robust estimation. An estimating means sets, on an image, an annular effective area A1 in a range where a distance from the center of the virtual line 101 becomes the radius of the virtual line 101± an allowable value, regards an edge point Pe in the effective area A1 as an effective point, regards an edge point Pe outside the effective area A1 as an ineffective outlier, and excludes the ineffective outlier from data when acquiring a visible outline 102. The estimating means acquires the visible outline 102 using only edge points Pe determined effective by the least squares method after determining whether each edge point Pe is effective or not. COPYRIGHT: (C)2011,JPO&INPIT
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