摘要 |
An electromechanical transducer, including: a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap; and an outer frame extending along an outer periphery of the plurality of devices, wherein the first electrode of each of the devices each includes a plurality of portions formed by electrically separating a device substrate with grooves, wherein the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves, wherein the first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and wherein the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions.
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