发明名称 |
GETTER HAVING TWO ACTIVATION TEMPERATURES AND STRUCTURE COMPRISING THIS GETTER |
摘要 |
The structure comprises a closed cavity under a controlled atmosphere in which a monoblock getter with a first getter layer is arranged. The first getter layer presents at least first and second getter areas which have different activation temperatures. The second getter area is formed on an adjustment sub-layer of the getter material activation temperature.
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申请公布号 |
US2011115056(A1) |
申请公布日期 |
2011.05.19 |
申请号 |
US20100917965 |
申请日期 |
2010.11.02 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
BAILLIN XAVIER |
分类号 |
H01L29/32 |
主分类号 |
H01L29/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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