发明名称 GETTER HAVING TWO ACTIVATION TEMPERATURES AND STRUCTURE COMPRISING THIS GETTER
摘要 The structure comprises a closed cavity under a controlled atmosphere in which a monoblock getter with a first getter layer is arranged. The first getter layer presents at least first and second getter areas which have different activation temperatures. The second getter area is formed on an adjustment sub-layer of the getter material activation temperature.
申请公布号 US2011115056(A1) 申请公布日期 2011.05.19
申请号 US20100917965 申请日期 2010.11.02
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 BAILLIN XAVIER
分类号 H01L29/32 主分类号 H01L29/32
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