| 摘要 |
<p>PURPOSE: A substrate transfer apparatus using a linear scale and a method for detecting position declination of the same are provided to improve the accuracy of a transfer robot by detecting the position declination of the transfer robot through the z-scale of the linear scale. CONSTITUTION: A transfer robot(140) transfers a substrate. A driving unit(144) moves the transfer robot in horizontal. A transfer rail(146) is combined with the driving unit and the guides the driving unit. A linear scale is installed in the driving unit and the transfer rail and detects position data in the movement of the transfer robot. A controller controls the driving unit to obtain position data from the linear scale in the movement of the transfer robot. The controller detects position declination from the position data in the movement of the transfer robot.</p> |
