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发明名称
PLASMABEHANDLUNGSANLAGE MIT SPULE MIT VARIABLER RF-KUPPLUNG
摘要
申请公布号
DE60045815(D1)
申请公布日期
2011.05.19
申请号
DE20006045815
申请日期
2000.02.10
申请人
LAM RESEARCH CORP.
发明人
NI, TUQIANG;COLLISON, WENLI;HOLLAND, JOHN P.
分类号
H01J37/32;H01F5/00;H01L21/205;H01L21/302;H01L21/3065;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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