发明名称 CONTROL VALVE DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a control valve device wherein the accuracy in opening and closing of a valve is improved. <P>SOLUTION: The control valve device 300 has a valve body 310 having a valve body head 310a, a power transmission member 320a for transmitting power to the valve body, a valve box 305 in which the valve body is slidably stored, a first bellows 320b which defines a first space Us at a position on the opposite side of the power transmission member to the valve body, a second bellows 320c which defines a second space Ls at a position on the side of the power transmission member to the valve body, a first pipe 320d which communicates with the first space, and a second pipe 320e which communicates with the second space. Power is transmitted from the power transmission member to the valve body in accordance with the pressure ratio of working fluid supplied to the first space and the second space, so that the valve body head opens and closes a transfer path formed in the valve box. The valve body head has a Vickers hardness higher than that of the valve seat surface of the transfer path, with which the valve body head is brought into contact, and the hardness difference therebetween is generally 200-300 Hv. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011099542(A) 申请公布日期 2011.05.19
申请号 JP20090256210 申请日期 2009.11.09
申请人 FUJIKIN INC;TOKYO ELECTRON LTD;TOHOKU UNIV 发明人 IKEDA SHINICHI;YAMAJI MICHIO;TANIGAWA TAKESHI;KANEKO HIROYOSHI;YAGI YASUSHI;ONO YUJI;OMI TADAHIRO;SHIRAI YASUYUKI
分类号 F16K31/126 主分类号 F16K31/126
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