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发明名称
MAGNESIUM OXIDE SINGLE CRYSTAL VAPOR DEPOSITION MATERIAL AND PROCESS FOR PRODUCING THE SAME
摘要
申请公布号
KR101035634(B1)
申请公布日期
2011.05.19
申请号
KR20077015204
申请日期
2006.01.26
申请人
发明人
分类号
C23C14/24;H01J9/02;H01J11/02;H01J11/22;H01J11/34;H01J11/40
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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