| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which can be manufactured easily while assuring high electric insulation. SOLUTION: The electrostatic chuck includes an upper plate 12 having substrate holding electrodes 9a and 9b for holding a substrate S, a lower plate 14 having a plasma electrode for generating plasma, and a thermal fusion sheet 13 composed of a fluorine-containing ethylene polymer having a hydroxyl group and interposed between the upper plate 12 and the lower plate 14 in order to bond them each other while insulating electrically from each other. COPYRIGHT: (C)2011,JPO&INPIT |
