| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment method highly accurately processing a workpiece having an alignment mark formed in a section with a difference of elevation. SOLUTION: In an alignment method, a line to be processed of a workpiece is detected wherein an alignment mark of the workpiece exists over a section with a difference of elevation. The alignment method includes: an imaging step of acquiring a plurality of captured images by repeating steps of relatively moving an imager from an upper surface of the workpiece in the direction closing to the workpiece, focusing on one part of the alignment mark to image, and then focusing on other part of the alignment mark to image; a mark image forming step of combining the plurality of captured images acquired to form a clear mark image; and a detecting step of detecting the line to be processed based on the mark image formed. COPYRIGHT: (C)2011,JPO&INPIT |
