| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing film not producing a large and rough particle, having little generation of polishing flaw on a surface of a body to be polished, capable of being used for high accurate polishing and being repeatedly used at many times, a method of manufacturing the same, and a coating agent. SOLUTION: The polishing film including a substrate film 11 and a polishing layer 13 constituted of a polishing material particle and a binder is characterized in that the binder contains a silicone based resin having a functional group having affinity for the polishing material particle and a fluorine-containing copolymer containing a hydroxyl group, and the binder is cured by a curing agent. Further, the polishing film is also characterized in that center line average roughness Ra of the polishing layer 13 is 0.005-0.5μm, whole line transmittance is 60-95% and a haze value is 1-70%. COPYRIGHT: (C)2011,JPO&INPIT
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