| 摘要 |
A sensor chip includes: a substrate that has a planar portion; and a diffraction grating, on which a target substance is placed, that includes a plurality of first protrusions periodically arranged in a period equal to or greater than 100 nm and equal to or less than 1000 nm in a first direction that is parallel to the planar portion, a plurality of base portions that is located between two of the first protrusions adjacent to each other and configures a base of the substrate, and a plurality of second protrusions that is formed on upper faces of the plurality of the first protrusions, has a surface formed from a metal, and is formed on the planar portion.
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