| 摘要 |
<p>PURPOSE: A surface treating agent and a surface treating method using the same are provided to obtain highly hydrophobic surface of a substrate although the surface of the substrate contains TiN or SiN. CONSTITUTION: A surface treating agent is used for the hydrophobization of the surface of a substrate and includes a cyclic silazane compound. The cyclic silazane compound is cyclic disilazane compound or cyclic trisilazne compound. The cyclic disilazane compound is one of 2,2,5,5- tetramethyl-2,5-disila-1-azacyclopentane and 2,2,6,6-tetramethyl-2,6-disila-1-azacyclohexane. The cyclic trisilazne compound is one of 2,4,4,6,6-hexamethylcyclotrisilazane and 2,4,6-trimethyl-2,4,6-trivinylcyclotrisilazane.</p> |
