| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining method for increasing a degree of freedom of a machining shape while enhancing accuracy of the machining shape. <P>SOLUTION: In forming a recess on a substrate W being a workpiece, a condensing point L<SB>s1</SB>of a modifying laser beam L1 as a first laser beam is scanned inside the substrate W and then, a modified layer Wr as the boundary of a laser beam machining region R1 is formed in a position corresponding to the bottom of the recess (step of forming a modified layer). Succeedingly, the surface Wa of the substrate W is converged and irradiated with a machining laser beam as a second laser beam, removably machining the laser beam machining region R1 divided by the modified layer Wr, and thereby forming the recess (step of removing/machining). <P>COPYRIGHT: (C)2011,JPO&INPIT |
