SOLAR CELL, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell capable of improving efficiency of the solar cell by reducing loss of charge.

SOLUTION: This method of manufacturing a solar cell includes steps of: preparing a semiconductor substrate 110 including a p-type layer and an n-type layer 110a, 110b; forming a dielectric film 130 including aluminum oxynitride on one surface of the semiconductor substrate; forming a first electrode electrically connected with the p-type layer of the semiconductor substrate; and forming a second electrode electrically connected with the n-type layer of the semiconductor substrate. The step of forming the dielectric layer repeatedly performs a step of forming the aluminum nitride film and a step of substituting at least a part of nitrogen of the aluminum nitride film with oxygen. This solar cell manufactured by the method is also provided.

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