| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer storage container suppressing the spread of fire if a fire occurs in a plant storing wafer storage containers therein. SOLUTION: The present invention relates to a wafer storage container 1 including: a container body 2 having an opening and being adapted to store wafers; a lid 3 adapted to close the opening of the container body so as to seal it with a seal gasket member 21; and delivery components attached to the exterior face part of the container body, wherein all the container body 2, the lid 3 and the delivery components are formed of a self-extinguishing material. COPYRIGHT: (C)2011,JPO&INPIT |
