发明名称 DEVICE AND METHOD FOR TEMPERING OBJECTS IN A TREATMENT CHAMBER
摘要 The invention relates to a device (1) and to a method for tempering objects (2, 15). According to the invention, a temporary process box (11) is used to overcome the disadvantages of tempering processes previously known, in particular to achieve a high level of reproducibility and a high throughput during the tempering process, at the same time reducing the investment costs such that overall, the entire tempering process is carried out in a highly economical manner.
申请公布号 US2011117693(A1) 申请公布日期 2011.05.19
申请号 US20090991110 申请日期 2009.05.08
申请人 PALM JORG;BAUMBACH JORG;KARG FRANZ;FURFANGER MARTIN 发明人 PALM JORG;BAUMBACH JORG;KARG FRANZ;FURFANGER MARTIN
分类号 H01L21/26;C21D9/00 主分类号 H01L21/26
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