发明名称 TUNING FORK QUARTZ CRYSTAL RESONATOR
摘要 A tuning fork quartz crystal resonator has a base and two resonating arms extended in parallel from the same side of the base. Each resonating arm has asymmetric grooves on its upper and bottom surface, and the via-hole to reliably connect the top and bottom electrode. The asymmetric groove design can simplify the manufacturing process and lower the manufacturing cost. The base has continuous concave on both side surfaces and a recess on the main surface. The energy of ultrasonic wave propagating via the base mounting pads into the ceramic package can be reduced. This unique tuning fork quartz crystal resonator can prevent dramatic reduction of the Q value, and retain the outstanding quality of the resonator.
申请公布号 US2011115342(A1) 申请公布日期 2011.05.19
申请号 US20100789652 申请日期 2010.05.28
申请人 WAFER MEMS CO., LTD. 发明人 YANG CHIEN CHENG;WANG WIN YNG;LEE HUNG PENG
分类号 H01L41/04;H01L41/047 主分类号 H01L41/04
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