| 摘要 |
<p>A microengineered supercritical fluid chromatography (SFC) system comprises a microchannel that is microfabricated from a substrate so that it forms a monolithic chromatographic microcolumn. A pump 201 pressurises a reservoir compressible fluid so that it maintains a supercritical state along the flow path between the pump 201 and flow restrictor 208. A valve 202 may be used to inject a sample 203, preferably in solution into the flow path and onto the microcolumn 211. An organic modifier 210 may be added to the flow path to adjust the polarity of the solvent. The microchannel 211 may be microfabricated onto a substrate material selected from one or more of semiconductor materials, glass, alumina, Pyrex®, quartz, polyimide, Su8, or PEEK, conductive polymers, polymers or ceramic materials, by means of one or more microfabrication processes including photolithography, wet etching, eximer laser machining, ultrasonic polishing, crystal plane etching, electroforming, deep reactive ion etching, microinjection moulding or LIGA. A second substrate may be mounted relative to the first substrate to define a sandwich structure within which the microchannel 211 is defined. The microchannel 211 may be coated with or packed with a sorbent material. The device may comprise heating and cooling elements and detectors.</p> |
