首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Method and apparatus for process state monitoring and state transition detection
摘要
申请公布号
EP1570363(B1)
申请公布日期
2011.05.18
申请号
EP20030808456
申请日期
2003.12.11
申请人
LAM RESEARCH CORPORATION
发明人
GOTKIS, YEHIEL;KATZ, VLADIMIR;HEMKER, DAVID;KISTLER, RODNEY;BRIGHT, NICOLAS, J.
分类号
G06F15/00;G05B23/02;H01L21/66
主分类号
G06F15/00
代理机构
代理人
主权项
地址
您可能感兴趣的专利
ELASTIC MIXTURE FOR PAVEMENT
THERMOPLASTIC ELASTOMER COMPOSITION FOR POWDER SLUSH MOLDING, AND POWDER SLUSH MOLDING MATERIAL
IMAGE FORMING APPARATUS
HANGING HOLDER FOR TARGET ROD OF HEAT FURNACE IN THE PRODUCTION OF PARENT MATERIAL FOR OPTICAL FIBER
ULTRASONOGRAPHING METHOD AND DEVICE
FRICTION TYPE TRANSMISSION
SAFETY TRAVELLING DEVICE FOR WHEELCHAIR
DEVICE AND METHOD FOR PROCESSING FLOWERING PLANT, AND FLOWERING PLANT
PRINTER
MANUFACTURE OF METAL-CORE PRINTED WIRING BOARD
HYDRAULIC CONTROLLER FOR AUTOMATIC TRANSMISSION FOR VEHICLE
BASE ISOLATION STRUCTURE
DRAINAGE SYSTEM FOR BRIDGE
DEVICE AND METHOD FOR FRICTION-STIRRING-WELDING
COMPOSITION FOR IMPROVING FREEZING/THAWING DURABILITY OF MASONRY UNIT CONTAINING EFFLORESCENCE INHIBITOR BASED ON FATTY ACID
LUBRICATING OIL, ITS PRODUCTION, HYDRODYNAMIC LUBRICATION BEARING, SPINDLE MOTOR AND ROTOR APPARATUS
WELDED STEEL PIPE EXCELLENT IN WEATHERABILITY
Image forming apparatus
Portable radio telephone set
Information recording apparatus using erasure units
