WAFER TRAY UNIT

摘要

PURPOSE: A wafer tray unit is provided to form an opening on the body of a substrate tray to suction a plurality of substrates, thereby preventing a substrate from deviating the substrate tray. CONSTITUTION: A body(11) contains a substrate. An opening(15) is formed in the body. A guide unit(16) surrounds the body. The guide unit comprises a rounded guide face(17) which connects the top unit of the guide unit with the upper surface of the body. The guide unit is integrated with the body.