DEBRIS MITIGATION SYSTEM WITH IMPROVED GAS DISTRIBUTION

摘要

The present invention relates to a debris mitigation system, in particular for use in a radiation unit for EUV radiation and/or X-rays. The debris mitigation system comprises a foil trap ( 11 ) having several passages allowing a straight passage of radiation and one or several feed pipes ( 5 ) for gas supply of buffer gas ( 7 ) to said foil trap. The foil trap has at least one interior space ( 14 ) extending over several of said passages, wherein the feed pipes open into that space. The present debris mitigation system allows effective debris mitigation.