SELECTIVE WET ETCHING OF INORGANIC ANTIREFLECTIVE COATINGS,申请号EP19990905487-传众专利搜索

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发明名称	SELECTIVE WET ETCHING OF INORGANIC ANTIREFLECTIVE COATINGS
摘要
申请公布号	EP1062691(B1)	申请公布日期	2011.05.18
申请号	EP19990905487	申请日期	1999.01.28
申请人	MICRON TECHNOLOGY, INC.	发明人	TOREK, KEVIN, JAMES;WHONCHEE, LEE;SATISH, BEDGE
分类号	H01L21/027;H01L21/306;H01L21/311	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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