SLIT COATER HAVING AN AIR KNIFE

摘要

PURPOSE: A slit coating apparatus is provided to previously prevent the damage of a slit nozzle by previously eliminating foreign materials remained on a loaded substrate using an air knifer. CONSTITUTION: A slit coating apparatus(200). A slit nozzle(210) applies a photo-resist on a substrate. A nozzle supporting part(220) supports the slit nozzle. The substrate is loaded on a substrate chuck(202). The nozzle supporting part is separately arranged at the front side of the slit nozzle and includes an air knifer(270). The air knifer sprays air toward a nozzle. The nozzle supporting part further includes a foreign material detecting part(260). The foreign material detecting part is arranged between the slit nozzle and the air knifer and detects the presence of the foreign materials on the substrate.