| 摘要 |
PURPOSE: A test circuit in a semiconductor device with a copper wire is provided to form a simple circuit to sense whether copper moves in the metal wire of the semiconductor device, thereby efficiently sensing a defect in the semiconductor device. CONSTITUTION: A first pattern(210) corresponding to a bit line formed in the cell area is formed on a scribe lane area. The shape and the location of the first pattern correspond to the shape and the location of the second pattern. A third pattern(230) is formed on the second pattern. A fourth pattern(240) connects a part of the third pattern. A fifth pattern(250) is formed on the third pattern and the fourth pattern.
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